FISCHERSCOPE® X-RAY XUV® Measuring Systems

The FISCHERSCOPE® X-RAY XUV® is equipped with a large measurement chamber that can be evacuated. With its large-area silicon drift detector, the XUV® can detect fluorescence radiation with low energy down to about 1 keV, specifically enabling measurement of the elements Na and Mg as well as the L-radiation of Zn, Cu and Ni. Due to the high count rates possible when using large apertures, very small repeatability precision values and low detection limits can be achieved, making the XUV® suitable for measuring the thinnest of coatings, as well as for trace analysis.

Optimal measuring conditions can be created for every measurement using the exchangeable apertures and primary filters. The measurement position is shown in the video image during the measurement. With its spacious and easily accessible measurement chamber and the programmable XYZ-stage, this instrument accommodates flat, plane objects as well as specimens with complex shapes.